Investigation on bistabelity in inductively-coupled plasma torches with non-conventional coil

High Temperature Material Processes

Volumn 7, Issue 1, 2003, Pages 71-76

  Bernardi, D ^a   Colombo, V ^a   Coppa, G G M ^b   Ghedini, E ^a   Mentrelli, A ^a  

^a UNIVERSITY OF BOLOGNA   (Italy)

^b POLITECNICO DI TORINO   (Italy)

Author keywords

Bistability; Inductively coupled plasma torch; Non conventional coil configuration; Parametric analysis; Time dependent simulation

Indexed keywords

ELECTRIC COILS; HYSTERESIS; PARAMETER ESTIMATION; PLASMA TORCHES;

INDUCTION COIL CURRENT;

INDUCTIVELY COUPLED PLASMA;

EID: 0141527851     PISSN: 10933611     EISSN: None     Source Type: Journal    
DOI: 10.1615/HighTempMatProc.v7.i1.110     Document Type: Conference Paper

References (4)

1. D. Bernardi, V. Colombo, G.G.M. Coppa, E. Ghedini and A. Mentrelli, Parametric study on operating conditions and energy efficiency for two-stage hybrid RF-RF and one-stage modified-coil RF plasma torches, Proceedings of ISPC15, 1, 161-166, Orléans, July 2001.
2. D. Bernardi, V. Colombo, G.G.M. Coppa, E. Ghedini and A. Mentrelli, Investigation on operating conditions and efficiency optimization of RF-RF hybrid plasma torches, in Progress in Plasma Processing of Materials 2001, P. Fauchais Ed., Begell House, 339-346, 2001.
3. D. Bernardi, V. Colombo, G.G.M. Coppa and A. D'Angola, Simulation of the ignition transient in RF inductively-coupled plasma torches, Eur. Phys. J. D, 14, 337-348, 2001.
4. V. Colombo, C. Panciatichi, A. Zazo, G. Cocito, L. Cognolato, Modelling, Project, Numerical Simulation, and AES Temperature Diagnostics of an Inductively Coupled Plasma Torch for the Deposition of High-Purity Fused Silica for Optical Waveguide Production, IEEE Trans. on Plasma Science, 25, 1073-1080, 1997.