SCOPUS 정보 검색 플랫폼

Volumn 144, Issue 5, 1997, Pages

Nondestructive anodic bonding test

a CSIC (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMISTRY; ELECTRONICS PACKAGING; ELECTROSTATICS; QUALITY CONTROL;

ANODIC BONDING;

NONDESTRUCTIVE EXAMINATION;

EID: 0031146076 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1837627 Document Type: Article

Times cited : (13)

References (7)

1
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- Chr. Burrer, J. Esteve, J. A. Plaza, M. Bao, O. Ruiz, and J. Samitier, Sens. Actuators, 43, 115 (1994).
- (1994) Sens. Actuators , vol.43 , pp. 115
- Burrer, Chr.¹ Esteve, J.² Plaza, J.A.³ Bao, M.⁴ Ruiz, O.⁵ Samitier, J.⁶

2
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- F. Rudolf, A. Jornod, J. Berqvist, and H. Leuthold, ibid., A21-A23, 297 (1990).
- (1990) Sens. Actuators , vol.A21-A23 , pp. 297
- Rudolf, F.¹ Jornod, A.² Berqvist, J.³ Leuthold, H.⁴

3
- 0029213679
- C. Cané, F. Campabadal, J. Esteve, M. Lozano, J. Santander, Ch. Burrer, J. A. Plaza, L. Pahun, and S. Marco, ibid., A46-47, 133 (1995).
- (1995) Sens. Actuators , vol.A46-47 , pp. 133
- Cané, C.¹ Campabadal, F.² Esteve, J.³ Lozano, M.⁴ Santander, J.⁵ Burrer, Ch.⁶ Plaza, J.A.⁷ Pahun, L.⁸ Marco, S.⁹

4
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- M. Nese and A. Hannenborg, ibid., A37-38, 61 (1993).
- (1993) Sens. Actuators , vol.A37-38 , pp. 61
- Nese, M.¹ Hannenborg, A.²

5
- 0026993124
- T. G. Stratton, D. W. Burns, and B. D. Speldrich, in Proceedings of the IEEE Solid State Sensor and Actuators Workshop, p. 82 (1992).
- (1992) Proceedings of the IEEE Solid State Sensor and Actuators Workshop , pp. 82
- Stratton, T.G.¹ Burns, D.W.² Speldrich, B.D.³

6
- 0020750966
- T. R. Anthony, J. Appl. Phys., 54, 2419 (1983).
- (1983) J. Appl. Phys. , vol.54 , pp. 2419
- Anthony, T.R.¹

7
- 33644949327
- W. P. Mascara, G. Goetz, A. Caviglia, and J. B. McKitterick, ibid., 64, 4943 (1988).
- (1988) J. Appl. Phys. , vol.64 , pp. 4943
- Mascara, W.P.¹ Goetz, G.² Caviglia, A.³ McKitterick, J.B.⁴

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