PbZrxTi1-xO3 hydrothermal synthesis on titanium substrate for actuators

Microsystem Technologies

Volumn 6, Issue 1, 1999, Pages 15-18

  Ndiaye, P A ^a   Loiseau, B ^b   Minaud, S ^b   Pernod, P ^a   Tricot, J C ^a  

^a ECOLE CENTRALE DE LILLE   (France)

^b UNITÉ DE CATALYSE ET DE CHIMIE DU SOLIDE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0043284453     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050168     Document Type: Article

References (7)

1. Abe T; Reed ML (1994) RF-magnetron sputtering of piezoelectric lead zirconate titanate actuator films using composite targets. Proc. MEMS 94, Oiso-Japan, pp 164-169
2. De Keijser MS (1995) Organometallic chemical vapour deposition of lead zirconate titanate. JEME-Enidhoven, Phillips
3. Jaffe B; Cook WR; Jaffe H (1971) Piezoelectric ceramics. Academic Press, London and New York
4. Koinuma M; Ohmura H; Fujikoda Y; Matsumoto Y (1998) Preparation of PZT thin films on stainless steel using electrochemical reduction. J Solid State Chem 136:293-297
5. Mackenzie JD; Xu Y (1997) Ferroelectric materials by sol-gel method. J Sol-Gel Sci and Technol 8:673-679
6. Morita T; Kanda T; Yamagata Y; Kurosawa M; Higushi T (1997) Single process to deposit lead zirconate titanate thin film by hydrothermal method, Japanese J appl Phys Part 1 36 (5B):2298-2299
7. Shimomura K; Tsurumi T; Ohba Y; Daimon M (1991) Preparation of lead zirconate titanate thin film by hydrothermal method. Japanese J appl Phys 30 (9B):2174-2177