A scanning force microscope study of detachment of nanometer-sized particles from glass surfaces

Tribology Letters

Volumn 7, Issue 2-3, 1999, Pages 113-119

  Dickinson, J T ^a   Hariadi, R F ^a   Scudiero, L ^a   Langford, S C ^a  

^a Washington State University   (United States)

Author keywords

Chemical mechanical polishing; Humidity effects; Particle removal

Indexed keywords

EID: 0043266528     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1023/a:1019129622285     Document Type: Article

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