Optically detected magnetic resonance studies of defects in 3C SiC epitaxial layers

Diamond and Related Materials

Volumn 6, Issue 10, 1997, Pages 1381-1384

  Son, N T ^a   Sorman E ^a   Chen, W M ^a   Hallin, C ^a   Kordina, O ^a   Monemar, B ^a   Janzen E ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

Author keywords

Defects; ODMR; Photoluminescence; SiC thin films

Indexed keywords

EID: 0043229578     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(97)00099-X     Document Type: Article

References (3)

1. W.J. Choyke, Z.C. Feng, J.A. Powell, J. Appl. Phys. 64 (1988) 3163.
2. O. Kordina et al, J. Crystal Growth 154 (1995) 303.
3. N.T. Son et al, J. Appl. Phys. 79 (1996) 3784.