Comparative investigation of ECR-RIE patterns on Si and C faces of 6H-SiC using a CF4/O2 gas mixture

Diamond and Related Materials

Volumn 6, Issue 10, 1997, Pages 1463-1466

  Bonnot, R ^a   Syrkin, A L ^b   Leveque G ^b   Bluet, J M ^b   Camassel, J ^b  

^a UNIV MONTPELLIER   (France)

^b CNRS   (France)

Author keywords

RIE; SiC; Surface morphology

Indexed keywords

EID: 0043229551     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(97)00116-7     Document Type: Review

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