MEMS reliability modelling methodology: Application to wobble micromotor failure analysis

Microelectronics Reliability

Volumn 43, Issue 9-11, 2003, Pages 1945-1949

  Muratet, S ^a   Fourniols, J Y ^a   Soto Romero, G ^a   Endemano A ^b   Marty, A ^a   Desmulliez, M ^b  

^a LAAS CNRS   (France)

^b HERIOT WATT UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC MOTORS; FAILURE ANALYSIS;

WOBBLE MICROMOTORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0043195414     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(03)00330-5     Document Type: Conference Paper

References (7)

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3. W.M.Miller Reliability: a hidden barrier to successful commercialization of MEMS. Micromachine Devices (1997) pp. 1-4
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6. I. Dufour, E. S. Sarraute and A. Abbas Optimization of the geometry of electrostatic micromotors using only analytical equations. Journal of Micromechanics and Microengineering vol. 6 (1996) pp. 108-111.
7. JY. Fourniols, Méthodologie de conception des microsystèmes et systèmes intégrés: application aux systèmes embarqués, Habilitation à diriger les recherches, University Paul Sabatier, Toulouse, 2002.