Characteristics of Fe-Ni alloy deposits for MEMS applications

Jinshu Xuebao/Acta Metallurgica Sinica

Volumn 36, Issue 5, 2000, Pages 525-529

  Chen, Yao ^a   Zhang, Xuanxiong ^a   Xiong, Xingguo ^a   Wang, Weiyuan ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Fe Ni alloy deposit; Internal friction; Internal stress; Microelectromechanical system (MEMS); Thermal expansion coefficient (TEC); Young's modulus

Indexed keywords

EID: 0043186222     PISSN: 04121961     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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