Reformulation of the Fourier modal method with adaptive spatial resolution: Application to multilevel profiles

Optics Express

Volumn 10, Issue 1, 2002, Pages 24-34

  Vallius, T ^a   Honkanen, M ^a  

^a UNIVERSITY OF EASTERN FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY VALUE PROBLEMS; EIGENVALUES AND EIGENFUNCTIONS; IMAGING TECHNIQUES; MICROSTRUCTURE; MODAL ANALYSIS; OPTICAL RESOLVING POWER;

FOURIER MODAL METHODS; MULTILAYER PROFILES; SPATIAL RESOLUTION;

FOURIER OPTICS;

EID: 0042635728     PISSN: 10944087     EISSN: None     Source Type: Journal    
DOI: 10.1364/OE.10.000024     Document Type: Article

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