Simulation of depolarization effect by a rough surface for spectroscopic ellipsometry

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 20, Issue 6, 2003, Pages 1060-1066

  Jun, Kyung Hoon ^a   Kwak, Joong Hwan ^a   Lim, Koeng Su ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELLIPSOMETRY; INTEGRAL EQUATIONS; SPECTROSCOPIC ANALYSIS; SURFACE ROUGHNESS;

DEPOLARIZATION;

LIGHT SCATTERING;

EID: 0043076201     PISSN: 10847529     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAA.20.001060     Document Type: Article

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