The Metrological Basis for the Inspection of Microcomponents by Digital Holography;Messtechnische Grundlagen zur Inspektion von Mikrokomponenten mittels Digitaler Holografie

Technisches Messen

Volumn 68, Issue 2, 2001, Pages 68-79

  Osten, Wolfgang ^a   Seebacher, Sönke ^a   Baumbach, Thorsten ^a   Jüptner, Werner ^a  

^a BIAS BREMER INSTITUT FÜR ANGEWANDTE STRAHLTECHNIK GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIGITAL HOLOGRAPHY; DIGITAL MEASUREMENT; MATERIALS BEHAVIOR; MEASUREMENT SENSITIVITY; MEASUREMENT SYSTEM; MICRO SYSTEMS TECHNOLOGIES; OPTICAL MEASUREMENT TECHNIQUES; SMALL COMPONENTS;

CHARACTERIZATION; HOLOGRAPHIC INTERFEROMETRY; MEASUREMENTS; OPTICAL DATA PROCESSING;

COMPUTER GENERATED HOLOGRAPHY;

EID: 0042972616     PISSN: 01718096     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (20)

1. U. Schnars: Direct phase determination in hologram interferometry with use of digitally recorded holograms, J. Opt. Soc. Am. A 11 (1994) 2011-2015.
2. U. Schnars, W. Jüptner: Digital recording and reconstruction of holograms in hologram interferometry and shearography, Appl. Opt. 33 (1994) 4373-4377.
3. C. Wagner, S. Seebacher, W. Osten, W. Jüptner: Digital recording and numerical reconstruction of lensless Fourier holograms in optical metrology, Appl. Opt. 38 (1999) 22, 4812-4820.
4. W. Osten, M. Kujawinska: Active phase measuring metrology, In: P. K. Rastogi and D. Inaudi (Eds.): Trends in Optical Non-destructive Testing and Inspection, Elsevier Science B. V. 2000, pp. 45-69.
5. W. Osten: The application of optical shape measurement for the nondestructive evaluation of complex objects. Opt. Eng. 39 (2000) 1, 232-243.
6. Wernicke, G.; Osten, W.: Holografische Interferometrie -Grundlagen, Methoden und ihre Anwendung in der Festkörpermechanik. Physik-Verlag Weinheim 1982.
7. J. E. Sollid, "Holographic interferometry applied to measurements of small static displacements of diffusely reflecting surfaces," Appl. Opt. Vol. 8, pp. 1587-1595, 1969.
8. M. Takeda: Current trends and future directions of fringe analysis. Proc. SPIE Vol. 2544 (1995), 2-10.
9. D. C. Ghiglia, M. D. Pritt: Two-dimensional phase unwrapping. Wiley, New York 1998.
10. W. Osten: Digitale Verarbeitung und Auswertung von Interferenzbildern. Akademie Verlag Berlin 1991, S. 134-138.
11. U. Skudayski, W. Jüptner: Synthetic wavelength interferometry for the extension of the dynamic range. Proc. SPIE Vol. 1508 (1991), 68-72.
12. T. Pfeifer, J. Thiel: Absolutinterferometrie mit durchstimmbaren Halbleiterlasern. Technisches Messen 60 (1993) 5, 185-191.
13. M. Takeda, H. Yamamoto: Fourier-transform speckle profilometry: three-dimensional shape measurement of diffuse objects with large height steps and/or spatially isolated surfaces. Appl. Opt. 33 (1994), 7829-7837.
14. Y. Zou, G. Pedrini, H. Tiziani: Surface contouring in a video frame by changing the wavelength of a diode laser. Opt. Eng. 35 (1996) 4, 1074-1079.
15. W. Osten, W. Nadeborn, P. Andrä: General hierarchical approach in absolute phase measurement. Proc. SPIE Vol 2860 (1996), 2-13.
16. J. M. Huntley, H. Saldner: Temporal phase-unwrapping algorithm for automated interferogram analysis. Appl. Opt. 32 (1993) 17, 3047-3052.
17. Schnars, U.; Kreis, T.; Jüptner, W.: Digital recording and numerical reconstruction of holograms: Reduction of the spatial frequency spectrum. Opt. Eng. 35 (1996) 4, 977-982.
18. Kreis, T.: Holographic Interferometry. Akademie Verlag Berlin 1996.
19. Seebacher, S.; Baumbach, Th.; Osten, W.; Jüptner, W.: Combined measurement of shape and deformation of small objects using digital holographic contouring and holographic interferometry. Proc. Int. Conf. on Trends in Optical Nondestructive Testing, Lugano 2000, pp. 55-65.
20. W. Osten, S. Seebacher, T. Baumbach, W. Jüptner: Ein Messsystem zur Bestimmung von Materialkennwerten an Mikrokomponenten auf Basis der Digitalen Holografie, tm - Technisches Messen 68 (2001) 80-85.