메뉴 건너뛰기




Volumn 41, Issue 13, 2002, Pages 2508-2513

Absolute refractive indices and thermal coefficients of CaF2, SrF2, BaF2, and LiF near 157 nm

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; EXCIMER LASERS; OPTICAL INSTRUMENT LENSES; PHOTOLITHOGRAPHY; REFRACTIVE INDEX; THERMAL EFFECTS; ULTRAVIOLET RADIATION;

EID: 0036564009     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.41.002508     Document Type: Article
Times cited : (37)

References (17)
  • 1
    • 84975555063 scopus 로고
    • A redetermination of some optical properties of calcium fluoride
    • I. H. Malitson, “A redetermination of some optical properties of calcium fluoride,” Appi. Opt. 2, 1103-1107 (1963).
    • (1963) Appi. Opt. , vol.2 , pp. 1103-1107
    • Malitson, I.H.1
  • 2
    • 0001158795 scopus 로고    scopus 로고
    • Ab-solute refractive indices and thermal coefficients of fused silica and calcium fluoride near 193 nm
    • R. Gupta, J. H. Burnett, U. Griesmann, and M. Walhout, “Ab-solute refractive indices and thermal coefficients of fused silica and calcium fluoride near 193 nm,” Appl. Opt 37, 5964-5968 (1998).
    • (1998) Appl. Opt , vol.37 , pp. 5964-5968
    • Gupta, R.1    Burnett, J.H.2    Griesmann, U.3    Walhout, M.4
  • 4
    • 0002727477 scopus 로고
    • Guidelines for evaluating and expressing the uncertainty of NIST measurement results
    • U.S. Government Printing Office, Washington, D.C
    • B. N. Taylor and C. E. Kuyatt, “Guidelines for evaluating and expressing the uncertainty of NIST measurement results,” NIST Tech. Note 1297 (U.S. Government Printing Office, Washington, D.C., 1994).
    • (1994) NIST Tech. Note , vol.1297
    • Taylor, B.N.1    Kuyatt, C.E.2
  • 5
    • 84965016790 scopus 로고    scopus 로고
    • 7th ed. (Cambridge U. Press, Cambridge, UK
    • M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge U. Press, Cambridge, UK, 1999), pp. 190-193.
    • (1999) Principles of Optics , pp. 190-193
    • Born, M.1    Wolf, E.2
  • 6
    • 0025386144 scopus 로고
    • Refractometry by minimum de-viation: Accuracy analysis
    • D. Tentori and J. R. Lerma, “Refractometry by minimum de-viation: accuracy analysis,” Opt. Eng. 29, 160-168 (1990).
    • (1990) Opt. Eng. , vol.29 , pp. 160-168
    • Tentori, D.1    Lerma, J.R.2
  • 7
    • 4244149016 scopus 로고
    • Vacuum ultraviolet spectroscopy
    • E. C. Y. Inn, “Vacuum ultraviolet spectroscopy,” Spectrochim. Acta 7, 65-87 (1955).
    • (1955) Spectrochim. Acta , vol.7 , pp. 65-87
    • Inn, E.C.Y.1
  • 9
    • 0033308731 scopus 로고    scopus 로고
    • The NIST FT700 vacuum ultraviolet Fourier trans-form spectrometer: Applications in ultraviolet spectrometry and radiometry
    • G. R. Carruthers and K. F. Dymonds, eds., Proc. SPIE
    • U. Griesmann, R. Kling, J. H. Burnett, L. Bratasz, and R. A. Gietzen, “The NIST FT700 vacuum ultraviolet Fourier trans-form spectrometer: applications in ultraviolet spectrometry and radiometry,” in Ultraviolet Atmospheric and Space Remote Sensing: Methods and Instrumentation II, G. R. Carruthers and K. F. Dymonds, eds., Proc. SPIE 3818, 180-188 (1999).
    • (1999) Ultraviolet Atmospheric and Space Remote Sensing: Methods and Instrumentation II , vol.3818 , pp. 180-188
    • Griesmann, U.1    Kling, R.2    Burnett, J.H.3    Bratasz, L.4    Gietzen, R.A.5
  • 10
    • 0027659135 scopus 로고
    • An updated Edlen equation for the refractive index of air
    • K. P. Birch and M. J. Downs, “An updated Edlen equation for the refractive index of air,” Metrologia 30, 155-162 (1993).
    • (1993) Metrologia , vol.30 , pp. 155-162
    • Birch, K.P.1    Downs, M.J.2
  • 11
    • 0000363849 scopus 로고
    • Dispersion of nitrogen
    • E. R. Peck and B. N. Khanna, “Dispersion of nitrogen,” J. Opt. Soc. Am. 56, 1059-1063 (1966).
    • (1966) J. Opt. Soc. Am. , vol.56 , pp. 1059-1063
    • Peck, E.R.1    Khanna, B.N.2
  • 12
    • 0005814932 scopus 로고    scopus 로고
    • Refractivity of nitrogen gas in the vacuum ultraviolet
    • U. Griesmann and J. H. Burnett, “Refractivity of nitrogen gas in the vacuum ultraviolet,” Opt. Lett. 24, 1699-1701 (1999).
    • (1999) Opt. Lett. , vol.24 , pp. 1699-1701
    • Griesmann, U.1    Burnett, J.H.2
  • 13
    • 0000922875 scopus 로고    scopus 로고
    • Precision measure-ment of wavelengths emitted by a molecular fluorine laser at 157 nm
    • C. J. Sansonetti, J. Reader, and K. Vogler, “Precision measure-ment of wavelengths emitted by a molecular fluorine laser at 157 nm,” Appl. Opt. 40, 1974-1978 (2001).
    • (2001) Appl. Opt. , vol.40 , pp. 1974-1978
    • Sansonetti, C.J.1    Reader, J.2    Vogler, K.3
  • 14
    • 0001576592 scopus 로고
    • Optical anisotropy of silicon single crystals
    • J. Pastrnak and K. Vedam, “Optical anisotropy of silicon single crystals,” Phys. Rev. B 3, 2567-2571 (1971).
    • (1971) Phys. Rev. B , vol.3 , pp. 2567-2571
    • Pastrnak, J.1    Vedam, K.2
  • 16
    • 0035894439 scopus 로고    scopus 로고
    • Intrinsic bire-fringence in calcium fluoride and barium fluoride
    • J. H. Burnett, Z. H. Levine, and E. L. Shirley, “Intrinsic bire-fringence in calcium fluoride and barium fluoride,” Phys. Rev. B 64, 241-302 (2001).
    • (2001) Phys. Rev. B , vol.64 , pp. 241-342
    • Burnett, J.H.1    Levine, Z.H.2    Shirley, E.L.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.