Nano Mold Lithography for 40-nm Patterns

Journal of the Korean Physical Society

Volumn 39, Issue 1, 2001, Pages 157-159

  Park, C M ^a   Cho, B H ^a   Hyon, C K ^a   Hwang, S W ^b   Ahn, D ^b   Kim, E K ^c  

^a Korea University   (South Korea)

^b University of Seoul   (South Korea)

^c Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042839710     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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