Porous silicon optical sensor for vapors, liquid, and biological molecules

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5118, Issue , 2003, Pages 305-309

  De Stefano, Luca ^a   Rendina, Ivo ^a   Moretti, Luigi ^b   Rossi, Andrea M ^c   Lamberti, Annalisa ^d   Longo, Olimpia ^d   Arcari, Paolo ^d  

^a CNR   (Italy)

^b UNIVERSITY OF CALABRIA   (Italy)

^c ISTITUTO ELETTROTECNICO NAZIONALE GALILEO FERRARIS   (Italy)

^d UNIVERSITY OF NAPLES FEDERICO II   (Italy)

Author keywords

Biosensors; Microcavities; Nanostructures; Optical sensor; Porous silicon

Indexed keywords

BIOSENSORS; ETCHING; INTERFEROMETERS; LIGHT REFLECTION; LIQUIDS; MIRRORS; MOLECULES; OPTICAL SENSORS; POROUS SILICON; REFRACTIVE INDEX; SILICON WAFERS; VAPORS;

DISTRIBUTED BRAGG REFLECTORS; ELECTROCHEMICAL ETCHING; OPTICAL MICROCAVITIES;

NANOSTRUCTURED MATERIALS;

EID: 0042829317     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.498999     Document Type: Conference Paper

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