Design and analysis of two-dimensional zero-reference marks for alignment systems

Review of Scientific Instruments

Volumn 74, Issue 7, 2003, Pages 3549-3553

  Chen, Yuhang ^a   Huang, Wenhao ^a   Dang, Xueming ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; INTEGRATED CIRCUITS; LITHOGRAPHY; MATHEMATICAL MODELS; MATRIX ALGEBRA; NANOTECHNOLOGY; OPTICAL CORRELATION; PRECISION ENGINEERING;

ZERO-REFERENCE GRATINGS;

DIFFRACTION GRATINGS;

EID: 0042768124     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1578158     Document Type: Article

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