Fabrication of indium resistors by layer-by-layer nanoassembly and microlithography techniques

Solid-State Electronics

Volumn 47, Issue 11, 2003, Pages 2085-2088

  Shi, Jingshi ^a   Cui, Tianhong ^a  

^a LOUISIANA TECH UNIVERSITY   (United States)

Author keywords

Indium; Layer by layer self assembly; Resistivity; Resistor

Indexed keywords

ANNEALING; ELECTRIC CURRENTS; INDIUM; LITHOGRAPHY; NANOTECHNOLOGY; SELF ASSEMBLY; THIN FILMS;

INDIUM RESISTORS;

RESISTORS;

EID: 0042730087     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(03)00262-4     Document Type: Article

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