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Volumn 70, Issue 11, 1999, Pages 4331-4343

Elastic mid-infrared light scattering: A basis for microscopy of large-scale electrically active defects in semiconducting materials

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Indexed keywords


EID: 0042722460     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1150076     Document Type: Article
Times cited : (5)

References (86)
  • 19
    • 85034153519 scopus 로고
    • Second International Symposium on Advanced Laser Technologies, Prague, 8-13 November 1993
    • V. P. Kalinushkin, D. I. Murin, V. A. Yuryev, O. V. Astafiev, and A. I. Buvaltsev, in Second International Symposium on Advanced Laser Technologies, Prague, 8-13 November 1993, Proc. SPIE 2332, 146 (1995).
    • (1995) Proc. SPIE , vol.2332 , pp. 146
    • Kalinushkin, V.P.1    Murin, D.I.2    Yuryev, V.A.3    Astafiev, O.V.4    Buvaltsev, A.I.5
  • 22
    • 85034133200 scopus 로고    scopus 로고
    • note
    • They were identified as oxygen and carbon related defects.
  • 32
    • 0042552249 scopus 로고    scopus 로고
    • Proceedings of the Sixth International Conference on Defect Recognition and Image Processing in Semiconductors, Boulder, Colorado, 3-6 December 1995
    • V. P. Kalinushkin, A. N. Buzynin, O. V. Astafiev, D. I. Murin, and V. A. Yuryev, in Proceedings of the Sixth International Conference on Defect Recognition and Image Processing in Semiconductors, Boulder, Colorado, 3-6 December 1995, Inst. Phys. Conf. Ser. 149, 219 (1996).
    • (1996) Inst. Phys. Conf. Ser. , vol.149 , pp. 219
    • Kalinushkin, V.P.1    Buzynin, A.N.2    Astafiev, O.V.3    Murin, D.I.4    Yuryev, V.A.5
  • 33
    • 85034138633 scopus 로고    scopus 로고
    • Proceedings of the Sixth International Conference on Defect Recognition and Image Processing in Semiconductors, Boulder, Colorado, 3-6 December 1995
    • O. V. Astafiev, A. N. Buzynin, V. P. Kalinushkin, D. I. Murin, and V. A. Yuryev, in Proceedings of the Sixth International Conference on Defect Recognition and Image Processing in Semiconductors, Boulder, Colorado, 3-6 December 1995, Inst. Phys. Conf. Ser. 149, 343 (1996).
    • (1996) Inst. Phys. Conf. Ser. , vol.149 , pp. 343
    • Astafiev, O.V.1    Buzynin, A.N.2    Kalinushkin, V.P.3    Murin, D.I.4    Yuryev, V.A.5
  • 43
    • 85034144304 scopus 로고    scopus 로고
    • note
    • 2/2}.
  • 44
    • 85034154505 scopus 로고    scopus 로고
    • note
    • An experimental setup must be graduated in absolute units, e.g., against the light diffraction on a hole with known radius in a metal foil.
  • 45
    • 85034141088 scopus 로고    scopus 로고
    • note
    • It is clear, that this problem can never be solved accurately. One can always obtain a good enough approximation for θ(r,a), although.
  • 47
    • 0043053092 scopus 로고
    • Proceedings of the Ninth International Conference on Microscopy of Semiconducting Materials, Oxford, UK, 20-23 March 1995
    • O. V. Astafiev, V. P. Kalinushkin, and V. A. Yuryev, in Proceedings of the Ninth International Conference on Microscopy of Semiconducting Materials, Oxford, UK, 20-23 March 1995, Inst. Phys. Conf. Ser. 146, 775 (1995).
    • (1995) Inst. Phys. Conf. Ser. , vol.146 , pp. 775
    • Astafiev, O.V.1    Kalinushkin, V.P.2    Yuryev, V.A.3
  • 49
    • 0042051370 scopus 로고    scopus 로고
    • Proceedings of the Sixth International Conference on Defect Recognition and Image Processing in Semiconductors, Boulder, Colorado, 3-6 December 1995
    • O. V. Astafiev, V. P. Kalinushkin, and V. A. Yuryev, in Proceedings of the Sixth International Conference on Defect Recognition and Image Processing in Semiconductors, Boulder, Colorado, 3-6 December 1995, Inst. Phys. Conf. Ser. 149, 361 (1996).
    • (1996) Inst. Phys. Conf. Ser. , vol.149 , pp. 361
    • Astafiev, O.V.1    Kalinushkin, V.P.2    Yuryev, V.A.3
  • 51
    • 85034155780 scopus 로고    scopus 로고
    • note
    • It should be noted that any special procedure of surface preparation do change the properties of defects located close to the treated surface and may affect even the defects situated deep in the crystal volume.
  • 52
    • 85034118650 scopus 로고
    • Second International Symposium on Advanced Laser Technologies, Prague, 8-13 November 1993
    • O. V. Astafiev, V. P. Kalinushkin, and V. A. Yuryev, in Second International Symposium on Advanced Laser Technologies, Prague, 8-13 November 1993, Proc. SPIE 2332, 138 (1995).
    • (1995) Proc. SPIE , vol.2332 , pp. 138
    • Astafiev, O.V.1    Kalinushkin, V.P.2    Yuryev, V.A.3
  • 59
    • 84919278251 scopus 로고
    • edited by S. M. Rytov Academy of Sciences of USSR, Moscow
    • L. I. Mandelstam, Complete Works, Vol. 8, edited by S. M. Rytov (Academy of Sciences of USSR, Moscow, 1950), pp. 337-353.
    • (1950) Complete Works , vol.8 , pp. 337-353
    • Mandelstam, L.I.1
  • 61
    • 0042552242 scopus 로고
    • Gostekhteorizdat, Moscow
    • G. S. Landsberg, Optics, 3rd ed. (Gostekhteorizdat, Moscow, 1954), pp. 227-282.
    • (1954) Optics, 3rd Ed. , pp. 227-282
    • Landsberg, G.S.1
  • 69
    • 85034139032 scopus 로고    scopus 로고
    • note
    • The latter method may appear to be useful for further improvement of SLALS.
  • 70
    • 85034154966 scopus 로고    scopus 로고
    • note
    • Further, writing formulas we shall no longer discriminate between the probe beam of laser radiation and the wave arising on the defect: both of them are beams with limited lateral dimensions passing through the optical system. We shall attribute the results to either of them depending on the issue discussed.
  • 73
    • 85034129801 scopus 로고    scopus 로고
    • note
    • ex=2.36 μm, (Ref. 19)].
  • 74
    • 85034144435 scopus 로고    scopus 로고
    • Proceedings of the Sixth International Conference on Defect Recognition and Image Processing in Semiconductors, Boulder, Colorado, 3-6 December 1995
    • V. A. Yuryev, V. P. Kalinushkin, A. V. Zayats, Yu. A. Repeyev, and V. G. Fedoseyev, in Proceedings of the Sixth International Conference on Defect Recognition and Image Processing in Semiconductors, Boulder, Colorado, 3-6 December 1995, Inst. Phys. Conf. Ser. 149, 263 (1996).
    • (1996) Inst. Phys. Conf. Ser. , vol.149 , pp. 263
    • Yuryev, V.A.1    Kalinushkin, V.P.2    Zayats, A.V.3    Repeyev, Yu.A.4    Fedoseyev, V.G.5
  • 78
    • 85034155348 scopus 로고    scopus 로고
    • note
    • Formulas (2)-(4), (8), and (12) require the characteristic length of this distribution decay in a crystal to be short enough while ambipolar diffusion length in Si is usually of an order of 100 μm or even greater. That is why the role of the surface recombination in the image formation mechanism appears to be important for such materials as Si, unlike InP or GaAs where the diffusion lengths are as small as unities of microns.
  • 80
    • 85034123969 scopus 로고    scopus 로고
    • note
    • d∼√w|∈̃(x,y)| (Refs. 1 and 50)].
  • 81
    • 85034140792 scopus 로고    scopus 로고
    • note
    • x; the linear recombination is implied.
  • 83
    • 0001494681 scopus 로고    scopus 로고
    • Proceedings of the Sixth International Conference on Defect Recognition and Image Processing in Semiconductors, Boulder, Colorado, 3-6 December 1995
    • W. Seifert, M. Kittler, J. Vanhellemont, E. Simoen, C. Claeys, and F. G. Kirscht, in Proceedings of the Sixth International Conference on Defect Recognition and Image Processing in Semiconductors, Boulder, Colorado, 3-6 December 1995, Inst. Phys. Conf. Ser. 149, 319 (1996).
    • (1996) Inst. Phys. Conf. Ser. , vol.149 , pp. 319
    • Seifert, W.1    Kittler, M.2    Vanhellemont, J.3    Simoen, E.4    Claeys, C.5    Kirscht, F.G.6
  • 85
    • 0043053074 scopus 로고    scopus 로고
    • Proceedings of the Sixth International Conference on Defect Recognition and Image Processing in Semiconductors, Boulder, Colorado, 3-6 December 1995
    • G. Kissenger, J. Vanhellemont, D. Dräft, C. Claeys, and R. Richter, in Proceedings of the Sixth International Conference on Defect Recognition and Image Processing in Semiconductors, Boulder, Colorado, 3-6 December 1995, Inst. Phys. Conf. Ser. 149, 19 (1996).
    • (1996) Inst. Phys. Conf. Ser. , vol.149 , pp. 19
    • Kissenger, G.1    Vanhellemont, J.2    Dräft, D.3    Claeys, C.4    Richter, R.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.