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Volumn 91, Issue 1, 2003, Pages
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Inert gas clusters ejected from bursting bubbles during sputtering
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Author keywords
[No Author keywords available]
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Indexed keywords
ARGON;
CURRENT DENSITY;
ION BOMBARDMENT;
SPUTTERING;
SURFACES;
TEMPERATURE;
XENON;
BURSTING BUBBLES;
ION SURFACE BOMBARDMENT;
RESONANT CHARGE EXCHANGE;
ION IMPLANTATION;
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EID: 0042709539
PISSN: 00319007
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (19)
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References (22)
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