Microjoining of dissimilar materials for optoelectronic and biomedical applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4979, Issue , 2003, Pages 226-233

  Witte, Reiner ^a   Herfurth, Hans J ^a   Bauer, Ingo ^a  

^a Fraunhofer Center for Laser Technology   (United States)

Author keywords

Glass; Implantable microsystems; Laser micromachining; Polymers; Sapphire; Silicon

Indexed keywords

BIOMEDICAL ENGINEERING; CARBON DIOXIDE LASERS; DISSIMILAR MATERIALS; INDUSTRIAL APPLICATIONS; JOINING; LASER ABLATION; LASER APPLICATIONS; MICROMACHINING; NEODYMIUM LASERS; OPTOELECTRONIC DEVICES;

BIOMEDICAL APPLICATIONS; IMPLANTABLE MICROSYSTEMS; LASER JOINING; MICROJOINING; OPTOELECTRONIC APPLICATIONS; SCALING;

MICROELECTRONIC PROCESSING;

EID: 0042564446     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.478282     Document Type: Conference Paper

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