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Volumn 43, Issue 16, 1998, Pages 1344-1349

I-V and C-V properties of TiO2 thin film by pulsed-laser reactive deposition

Author keywords

Dielectric properties; Electrical properties; Pulsed laser deposition; TiO2

Indexed keywords

APOIDEA;

EID: 0042489641     PISSN: 10016538     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02883679     Document Type: Article
Times cited : (7)

References (11)
  • 1
    • 0030563117 scopus 로고    scopus 로고
    • 2 thin films by pulsed-laser deposition for waveguiding applications
    • 2 thin films by pulsed-laser deposition for waveguiding applications, Appl. Surf. Sci., 1996, 96: 836.
    • (1996) Appl. Surf. Sci. , vol.96 , pp. 836
    • Garapon, C.1    Champeaux, C.2    Mugnier, J.3
  • 3
    • 0000604901 scopus 로고    scopus 로고
    • 2 thin films grown on InP substrate at low-temperature by metal-organic chemical-vapor deposition
    • 2 thin films grown on InP substrate at low-temperature by metal-organic chemical-vapor deposition, J. Appl. Phys., 1996, 79: 4 459.
    • (1996) J. Appl. Phys. , vol.79 , pp. 4459
    • Kim, E.K.1    Son, M.H.2    Min, S.K.3
  • 4
    • 0028387893 scopus 로고
    • Optical and electrical properties of titanium dioxide films with a high magnitude dielectric constant grown on p-Si by metal organic chemical vapor deposition at low temperature
    • Kim, T. W., Jung, M. , Kim, H. J. et al., Optical and electrical properties of titanium dioxide films with a high magnitude dielectric constant grown on p-Si by metal organic chemical vapor deposition at low temperature, Appl. Phys. Lett., 1994, 64: 1407.
    • (1994) Appl. Phys. Lett. , vol.64 , pp. 1407
    • Kim, T.W.1    Jung, M.2    Kim, H.J.3
  • 5
    • 0041837194 scopus 로고
    • Composition of an oxide film formed after pulsed heating of a metal
    • Akimov, A. G., Gagarin, A. P., Dagurov, V. G. et al., Composition of an oxide film formed after pulsed heating of a metal, Sov. Phys. Tech. Phys., 1980, 25: 1 439.
    • (1980) Sov. Phys. Tech. Phys. , vol.25 , pp. 1439
    • Akimov, A.G.1    Gagarin, A.P.2    Dagurov, V.G.3
  • 6
    • 0542396195 scopus 로고
    • Laser produced Ti/Ti-oxide thin film structures
    • Thuillard, M., Allmen, M., Laser produced Ti/Ti-oxide thin film structures, Appl. Phys. Lett., 1985, 47: 936.
    • (1985) Appl. Phys. Lett. , vol.47 , pp. 936
    • Thuillard, M.1    Allmen, M.2
  • 7
    • 0001566135 scopus 로고
    • Composition and chemical reactions of titanium oxide films deposited by laser evaporation
    • Dai, C. M., Su, C. S., Chun, D. S., Composition and chemical reactions of titanium oxide films deposited by laser evaporation, J. Appl. Phys., 1991, 69: 3766.
    • (1991) J. Appl. Phys. , vol.69 , pp. 3766
    • Dai, C.M.1    Su, C.S.2    Chun, D.S.3
  • 8
    • 0031103686 scopus 로고    scopus 로고
    • Pulsed laser deposition of tantalum oxide thin films
    • Zhou, M. F., Fu, Z. W., Qin, Q. Z. et al., Pulsed laser deposition of tantalum oxide thin films, Appl. Surf. Sci., 1997, 108: 399.
    • (1997) Appl. Surf. Sci. , vol.108 , pp. 399
    • Zhou, M.F.1    Fu, Z.W.2    Qin, Q.Z.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.