Metrology issues in Cu-low-k chemical mechanical planarization

Materials Research Society Symposium - Proceedings

Volumn 750, Issue , 2002, Pages 561-566

  Zantye, Parshuram B ^a,b   Sikder, Arun K ^b   Thagella, Swetha ^b   Gulati, Nivedita ^a,b   Kumar, Ashok ^a,b  

^a University of South Florida   (United States)

^b UNIVERSITY OF SOUTH FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; DIELECTRIC MATERIALS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICE MANUFACTURE; SILICA; TRIBOLOGY;

CHEMICAL MECHANICAL PLANARIZATION;

CHEMICAL MECHANICAL POLISHING;

EID: 0042466532     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-750-y9.7     Document Type: Conference Paper

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