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Volumn 10, Issue 2-3, 2003, Pages 443-448
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RF-sputtered MoS2 film morphology and the imperfection nucleation model
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL ORIENTATION;
MORPHOLOGY;
NUCLEATION;
SEMICONDUCTING GALLIUM ARSENIDE;
SPUTTER DEPOSITION;
THERMAL EFFECTS;
FILM FORMATION;
THIN FILMS;
GLASS;
MOLYBDENUM;
SODIUM;
CONFERENCE PAPER;
CRYSTALLIZATION;
FILM;
SCANNING ELECTRON MICROSCOPY;
TEMPERATURE;
VAPOR;
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EID: 0042346227
PISSN: 0218625X
EISSN: None
Source Type: Journal
DOI: 10.1142/s0218625x03004743 Document Type: Conference Paper |
Times cited : (6)
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References (10)
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