Ion current-adapted control of the arc current in a pulsed cathodic arc process

Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 790-794

  Hettkamp, E ^a   Fuchs, H ^b   Mecke, H ^a  

^a OTTO VON GUERICKE UNIVERSITY   (Germany)

^b Wilo AG   (Germany)

Author keywords

Ion current density; Pulsed arc; Shape of arc current; Shape of ion current; Vacuum arc

Indexed keywords

ELECTRIC ARCS; ELECTRIC POWER SYSTEMS; PROTECTIVE COATINGS;

ION CURRENTS;

DEPOSITION;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 0042328068     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00355-4     Document Type: Article

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