Integrated high-voltage modulator for plasma immersion ion implantation with an RF plasma

Plasma Sources Science and Technology

Volumn 12, Issue 3, 2003, Pages 495-499

  Rogozin, A I ^a   Astrelin, V T ^b   Richter, E ^a   Moller W ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b BUDKER INSTITUTE OF NUCLEAR PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRONS; EXTRACTION; ION IMPLANTATION; MODULATORS; NITROGEN; STAINLESS STEEL;

INTEGRATED HIGH VOLTAGE MODULATOR; PLASMA IMMERSION; PLASMA IMMERSION ION IMPLANTATION; RADIO FREQUENCY PLASMA;

PLASMAS;

EID: 0042322472     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/12/3/327     Document Type: Article

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