Doping of nitrides into zinc oxide films

Key Engineering Materials

Volumn 248, Issue , 2003, Pages 87-90

  Sanmyo, Masahiro ^a   Tomita, Yasumasa ^a   Kobayashi, Kenkichiro ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

Beryllium nitrides; P type zinc oxide; Sputtering; X ray diffraction; X ray photoelectron spectroscopy

Indexed keywords

BINDING ENERGY; COMPOSITION EFFECTS; ELECTRIC CONDUCTIVITY OF SOLIDS; EXCITONS; HOLE MOBILITY; SEMICONDUCTOR DOPING; SPUTTERING; ZINC OXIDE;

AXIS LENGTH; HOLE CONDUCTIVITY;

NITRIDES;

EID: 0042322279     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/kem.248.87     Document Type: Article

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