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International Journal of the Japan Society for Precision Engineering
Volumn 33, Issue 2, 1999, Pages 83-86
Linear motion microsystem fabricated on a silicon wafer
Author keywords

Anisotropic etching; Linear motion system; Microsystem; Positioning; Silicon
Indexed keywords

EID: 0042314637     PISSN: 0916782X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Review
Times cited : (6)
References (4)
  • 1
    • 0020127035 scopus 로고
    • Silicon as a Mechanical Material
    • K. E. Peterson : Silicon as a Mechanical Material, Trans IEEE, 70, (1982) 420.
    • (1982) Trans IEEE , vol.70 , pp. 420
    • Peterson, K.E.1
  • 3
    • 0030673962 scopus 로고    scopus 로고
    • Microlinear Motion Bearing Produced by Anisotropic Etching of Silicon
    • N. Moronuki and Y. Furukawa : Microlinear Motion Bearing Produced by Anisotropic Etching of Silicon, Ann. CIRP, 46, 1, (1997) 151.
    • (1997) Ann. CIRP , vol.46 , Issue.1 , pp. 151
    • Moronuki, N.1    Furukawa, Y.2
  • 4
    • 33748560697 scopus 로고    scopus 로고
    • Position Control of Microlinear Motion Mechanism using Mechanical Vibration
    • Preprint in Japanese
    • N. Moronuki et al. : Position Control of Microlinear Motion Mechanism using Mechanical Vibration, Preprint of JSPE Spring Meeting, (1998) 551. (in Japanese)
    • (1998) JSPE Spring Meeting , pp. 551
    • Moronuki, N.1

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.