Micromachined room-temperature microbolometer for millimeter-wave detection and focal-plane imaging arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3064, Issue , 1997, Pages 122-133

  Rahman, Arifur ^a   Duerr, Erik K ^a   De Lange, Gert ^a   Hu, Qing ^a  

^a Research Laboratory of Electronics   (United States)

Author keywords

Focal plane arrays; Microbolometer; Micromachining

Indexed keywords

ANTENNAS; ASTRONOMY; BOLOMETERS; COMPOSITE MICROMECHANICS; DIPOLE ANTENNAS; FABRICATION; FOCUSING; GAUSSIAN BEAMS; INDUSTRIAL APPLICATIONS; MACHINING; MICROMACHINING; MILLIMETER WAVES; NIOBIUM; SEMICONDUCTING SILICON COMPOUNDS; SENSORS; SIGNAL DETECTION; SILICON WAFERS; TEMPERATURE SENSORS; TRANSITION METALS;

CENTER FREQUENCY (CF); FOCAL-PLANE ARRAYS; GAUSSIAN BEAM COUPLING; INCIDENT RADIATIONS; MICROBOLOMETER; MICROMACHINED; NB FILMS; ROOM-TEMPERATURE (RT); SILICON MICROMACHINING TECHNOLOGY; SIMULATION TOOLS; SINGLE ELEMENT; WAVE DETECTION; WAVE DETECTORS;

FREQUENCY RESPONSE;

EID: 0042297755     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.277073     Document Type: Conference Paper

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