A 12GHz lumped-element hybrid fabricated on a micromachined dielectric-air-metal (DAM) cavity

IEEE MTT-S International Microwave Symposium Digest

Volumn 1, Issue , 2003, Pages 487-490

  Nishino, Tamotsu ^a   Yoshida, Yukihisa ^a   Suehiro, Yoshiyuki ^a   Lee, Sang Seok ^a   Miyaguchi, Kenichi ^a   Fukami, Tatsuya ^a   Oh Hashi, Hideyuki ^a   Ishida, Osami ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CAPACITORS; CAVITY RESONATORS; COMPUTER SIMULATION; ELECTRIC INDUCTORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROWAVE DEVICES; NATURAL FREQUENCIES; SCANNING ELECTRON MICROSCOPY; SILICON NITRIDE;

LUMPED ELEMENT COMPONENTS;

DIELECTRIC DEVICES;

EID: 0042164486     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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