Monitoring of ultraprecision machining processes

International Journal of Advanced Manufacturing Technology

Volumn 21, Issue 8, 2003, Pages 571-578

  Dornfield, D A ^a   Lee, Y ^a   Chang, A ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Acoustic emission; Manufacturing; Precision; Process monitoring; Sensors

Indexed keywords

ACOUSTIC EMISSIONS; CHEMICAL MECHANICAL POLISHING; CONDITION MONITORING; MACHINE TOOLS; PRECISION ENGINEERING; SENSORS; SIGNAL PROCESSING;

PROCESS MONITORING; ULTRAPRECISION MACHINING PROCESS;

MACHINING;

EID: 0042158673     PISSN: 02683768     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00170-002-1294-2     Document Type: Article

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