Nitrogen bonding environments and local order in hydrogenated amorphous silicon nitride films studied by Raman spectroscopy

Journal of Applied Physics

Volumn 85, Issue 11, 1999, Pages 7899-7904

  Bandet, J ^a   Despax, B ^b   Caumont, M ^a  

^a Laboratoire de Physique des Solides   (France)

^b Laboratoire Plasma et Conversion d'Energie   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042123087     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.370604     Document Type: Article

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