Morphological investigation of porous samples by resonant backscattering spectrometry

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 533-539

  Paszti F ^a   Szilagyi E ^a   Horvath Z E ^b   Manuaba, A ^a   Battistig, G ^b   Hajnal, Z ^c   Vazsonyi E ^b  

^a WIGNER RESEARCH CENTRE FOR PHYSICS   (Hungary)

^b RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^c BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

Author keywords

Backscattering spectrometry; Porous silicon; Resonance; Structure

Indexed keywords

ANISOTROPY; ION BEAMS; MOLECULAR STRUCTURE; MORPHOLOGY; OXIDATION; POROSITY; SPECTROMETRY;

BACKSCATTERING SPECTROMETRY;

POROUS SILICON;

EID: 0042094872     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00739-8     Document Type: Article

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