A characterisation of the morphology of porous silicon films by proton energy loss fluctuation measurements with a narrow resonance in the 15N(p,αγ)12C reaction

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 122, Issue 1, 1997, Pages 99-112

  Amsel, G ^a   D'Artemare, E ^a   Battistig, G ^b   Morazzani, V ^a   Ortega, C ^a  

^a UNIVERSITÉ PARIS DESCARTES   (France)

^b RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CHARACTERIZATION; HEAT TREATMENT; MORPHOLOGY; POROUS SILICON; PROTONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

NARROW RESONANCE; PROTON ENERGY LOSS FLUCTUATIONS;

DIELECTRIC FILMS;

EID: 0030733993     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00723-9     Document Type: Article

References (28)

1. L.T. Canham, Appl. Phys. Lett. 57 (1990) 1046.
2. V. Lehman and U. Gösele, Appl. Phys. Lett. 58 (1991) 865.
3. M.I.J. Beale, J.D. Benjamin, M.J. Uren, N.G. Chew and A.G. Cullis, J. Cryst. Growth 73 (1985) 622.
4. A.G. Cullis, L.T. Canham and O D. Dosser, Mat. Res. Symp. Proc. 256 (1992) 7.
5. I. Berbezier and A. Halimaoui, J. Appl. Phys 74 (1993) 542.
6. R. Herino, G. Bomchil, K. Barla, C. Bertrand and J.L. Ginoux, J. Electrochem. Soc. 134 (1987) 1994.
7. V. Morazzani, J. L. Cantin, C. Ortega, B. Pajot, R. Rahbi, H.J. von Bardeleben, M. Rosenbauer and É. Vázsonyi, Thin Solid Films 276 (1996) 32.
8. H.J. von Bardeleben, D. Stievenard, A. Grosman, C. Ortega and J. Siejka, Phys. Rev. B 47 (1993) 10899.
9. C. Ortega, J. Siejka and G. Vizkelethy, Nucl. Instr. and Meth. B 45 (1990) 622.
10. A. Grosman, C. Ortega, J. Siejka and M. Chamarro, J. Appl. Phys 74 (1993) 1992.
11. S.J. Gregg and K.S.W. Sing, Adsorption, Surface Area and Porosity, 2nd Ed. (Academic Press, New York, 1991).
12. Y.S Wang, M. Gandais, A. Grosman, V. Morazzani and C. Ortega, to be published.
13. P. Levitz, Images de la Physique (CNRS, Paris, 1992) pp. 68-75.
14. G. Battistig, G. Amsel, E. d'Artemare and A. L'Hoir, Nucl. Instr. and Meth. B 85 (1994) 572.
15. F.C. Stedile, J.-J. Ganem, S. Rigo and I. Trimaille, J. Electrochem. Soc. 142 (1995) 1205.
16. B. Maurel, G. Amsel and J.P. Nadai, Nucl. Instr. and Meth. 197 (1982) 1.
17. G. Amsel, C. Cohen and B. Maurei, Nucl. Instr. and Meth. B 14 (1986) 226.
18. A. Grosman, Thesis, Université Denis Diderot Paris 7, January 1995.
19. V. Morazzani, Thesis, Université Denis Diderot Paris 7, January 1996.
20. R. Herino, A. Perio, K. Barla and G. Bomchil, Mater. Lett. 2 (1984) 519.
21. V. Morazzani, M. Chamarro, A. Grosman, S. Rigo, J. Siejka and M.J. von Bardeleben, J. of Lum. 57 (1993) 45.
22. G. Amsel, J.P. Nadai, C. Ortega, S. Rigo and J Siejka, Nucl. Instr. and Meth. 149 (1978) 705.
23. G. Amsel and J. A. Davies, Nucl. Instr. and Meth. 218 (1983) 177.
24. C. F. Williamson, J.P. Boujot and J. Picard, Tables of range and stopping power of chemical elements for charged particles of energy 0.05 to 500 MeV, Report CEA 'R 3042, Documentation Française, Paris (1960).
25. G. Amsel, J.P. Nadai, E. d'Artemare, D. David, E. Girard and J. Moulin. Nucl. Instr. and Meth. 92 (1971) 481.
26. G. Amsel, E. d'Artemare and E. Girard, Nucl. Instr. and Meth. 205 (1983) 5.
27. Z. Hajnal, E. Szilágyi, F. Pászti and G. Battistig, Nucl. Instr. and Meth. B 118 (1996) 617.
28. E. Szilágyi, Z. Hajnal, F. Pászti, O. Buiu, G. Craciun, C. Cobianu and É. Vázsonyi.