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Volumn 3, Issue , 2003, Pages 2005-2008
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Comparison of micromachined FBAR band pass filters with different structural geometry
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Author keywords
[No Author keywords available]
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Indexed keywords
ACOUSTIC RESONATORS;
ALUMINUM NITRIDE;
BANDPASS FILTERS;
INSERTION LOSSES;
MICROMACHINING;
PIEZOELECTRIC DEVICES;
Q FACTOR MEASUREMENT;
RETURN LOSSES;
ACOUSTIC BULK WAVE DEVICES;
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EID: 0042090653
PISSN: 0149645X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (4)
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References (6)
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