Microprobe analysis of light elements in nanoporous surfaces produced by helium ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 210, Issue , 2003, Pages 543-547

  Kennedy, V J ^a,b   Johnson, P B ^b   Markwitz, A ^a,b   Varoy, C R ^b   Short, K T ^c  

^a GNS SCIENCE   (New Zealand)

^b VICTORIA UNIVERSITY OF WELLINGTON   (New Zealand)

^c AUSTRALIAN NUCLEAR SCIENCE AND TECHNOLOGY ORGANISATION   (Australia)

Author keywords

Helium implantation; Nanoporous surfaces; NRA; Nuclear microprobe; PI3

Indexed keywords

HEAVY IONS; HELIUM; ION IMPLANTATION; SCANNING ELECTRON MICROSCOPY;

MICROPROBE ANALYSIS;

NANOSTRUCTURED MATERIALS;

EID: 0041975127     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)01094-2     Document Type: Conference Paper

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