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Volumn 18, Issue 8, 2003, Pages 897-901

Plasma temperature measurement of a low-pressure inductively coupled plasma using spectroscopic methods

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON ENERGY LEVELS; ELECTRON TRANSITIONS; MASS SPECTROMETRY; TEMPERATURE MEASUREMENT;

EID: 0041971400     PISSN: 02679477     EISSN: None     Source Type: Journal    
DOI: 10.1039/b303191h     Document Type: Article
Times cited : (15)

References (24)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.