CPW phase shifter using barium strontium titanate thin film on silicon substrate

IEEE Antennas and Propagation Society, AP-S International Symposium (Digest)

Volumn 3, Issue , 2003, Pages 970-972

  Yoon, Hargsoon ^a   Vinoy, K J ^a   Abraham, Jose K ^a   Varadan, Vijay K ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM COMPOUNDS; CMOS INTEGRATED CIRCUITS; INTEGRATION; PHASE SHIFTERS; POLYSILICON; SPUTTERING; SUBSTRATES; THIN FILMS;

BARIUM STRONTIUM TITANATE THIN FILM; BILATERAL INTERDIGITAL STRUCTURE; SILICON SUBSTRATES;

WAVEGUIDES;

EID: 0041941201     PISSN: 02724693     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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