Limits of 3-D nanostructures fabricated by focused electron beam (FEB) induced deposition

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5023, Issue , 2003, Pages 4-10

  Hoffmann, P ^a   Utke, I ^a   Cicoira, F ^a  

^a EPFL   (Switzerland)

Author keywords

Focused electron beam (FEB) induced deposition; MO CVD; Nanostructures; Scanning Probe Microscopy (SPM) tips; Selective 3 D deposition

Indexed keywords

ADSORPTION; COMPOSITION; DECOMPOSITION; ELECTRON BEAMS;

SCANNING PROBE MICROSCOPY (SPM);

NANOSTRUCTURED MATERIALS;

EID: 0041877120     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.510421     Document Type: Conference Paper

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