An Optical Gas Sensor Based on Ellipsometric Readout

Proceedings of IEEE Sensors

Volumn 1, Issue 1, 2002, Pages 339-342

  Wang, Guoliang ^a   Arwin, Hans ^a   Jansson, Roger ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

Author keywords

Off null ellipsometry; Optical gas sensor; Porous silicon layers

Indexed keywords

CHEMICAL MODIFICATION; CHEMICAL SENSORS; ETCHING; LIGHT POLARIZATION; OPTICAL BEAM SPLITTERS; PHOTODETECTORS; POROUS SILICON; PRINCIPAL COMPONENT ANALYSIS; READOUT SYSTEMS; SEMICONDUCTOR LASERS; THERMOOXIDATION;

OFF-NULL ELLIPSOMETRY; OPTICAL GAS SENSORS; POROUS SILICON LAYERS;

OPTICAL SENSORS;

EID: 0041843411     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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