Effect of source supply method on microstructure development in PZT thin films by pulsed metalorganic chemical vapor deposition

Key Engineering Materials

Volumn 248, Issue , 2003, Pages 53-56

  Fujito, Keisuke ^a   Wakiya, Naoki ^a   Shinozaki, Kazuo ^a   Mizutani, Nobuyasu ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Epitaxial growth; Metalorganic chemical vapor deposition; PZT; Source gas pulse supply; Thin film

Indexed keywords

ARGON; MAGNESIA; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SINGLE CRYSTALS; STOICHIOMETRY; SURFACE ROUGHNESS; THIN FILMS; VACUUM;

LEAD ZIRCONATE TITANATE; PYROCHOLORE PHASE;

LEAD COMPOUNDS;

EID: 0041821406     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Article

References (6)

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