Colour sensing applications of hydrogenated amorphous silicon carbide

Diamond and Related Materials

Volumn 6, Issue 10, 1997, Pages 1542-1546

  Müller, Gerhard ^a  

^a DAIMLER AG   (Germany)

Author keywords

Amorphous semi conductors; Colour sensors; Micro analysis systems; Optoelectronics

Indexed keywords

EID: 0041727029     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(97)00065-4     Document Type: Article

References (11)

1. For a review see: J. Kanicki (Ed.), Amorphous and Microcrystalline Semiconductor Devices, Artech House, Boston, 1991.
2. A. Catalano, Solar cells made of amorphous and microcrystalline semiconductors, Ref. [2], pp. 9-76.
3. For a review see: W. Luft, Y.S. Tsuo, Hydrogenated Amorphous Silicon Alloy Deposition Processes, Marcel Dekker, Inc., New York, Basel, Hong Kong, 1993.
4. G. Müller, G. Krötz, SiC as a new sensor material, Proc. 7th Int. Conf. on Solid State Sensors and Actuators, Yokohama, Japan, May 1993.
5. G. Müller, G. Krötz, E. Niemann, SiC for sensors and high-temperature electronics, Sensors and Actuators 43 (1994) 259-268.
6. G. Krötz, G. Müller, G. Derst, Ch. Wilbertz, S. Kalbitzer, Thin-film SiC as an optical and optoelectronic material, Diamond Relat. Mater. 3 (1994) 917-921.
7. J. Wind, G. Krötz, R. Schmiedgen, W. Legner, J. Binder, V. Hechtenberg, G. Müller, Colour detection using amorphous semi-conductor thin-films, Sensors and Actuators A 36 (1993) 187-192.
8. Final report BRITE/Euram Project, Diamond and Silicon Carbide Sensors (DISCS), 1993.
9. G. Müller, P.P. Deimel, W. Hellmich, Chr. Wagner, Proc. EMRS Spring Conf. 1996, Straßburg; Symposium B.
10. W. Lang, Silicon microstructuring technology, Materials Science and Engineering, R17, No 1, 1 September 1996.
11. M. Lambrechts, W. Sansen, Biosensors: Microelectrochemical Devices, Institute of Physics Publishing, Bristol, Philadelphia, New York, 1992.