Light beam induced current (LBIC) technique for semiconductors and ICs testing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5064, Issue , 2003, Pages 269-274

  Domaradzki, J ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Induced current; Light beam; Semiconductor

Indexed keywords

COLOR; DATA ACQUISITION; DEFECTS; ELECTRIC CURRENT MEASUREMENT; IMAGE PROCESSING; INTEGRATED CIRCUIT TESTING; POLYCRYSTALLINE MATERIALS; SEMICONDUCTOR DEVICE TESTING; SOLAR CELLS;

DIGITAL DATA ACQUISITION; LIGHT BEAM INDUCED CURRENT; POINT SCANNING; SEMICONDUCTOR STRUCTURE; SILICON POLYCRYSTALLINE SOLAR CELLS;

PHOTOCURRENTS;

EID: 0041624306     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.501534     Document Type: Conference Paper

References (10)

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