Characterization by x-ray photoelectron spectroscopy of the chemical structure of semi-insulating polycrystalline silicon thin films

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 4, 1996, Pages 2693-2700

  Iacona, Fabio ^a  

^a CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001551607     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589006     Document Type: Article

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