3D silicon micromachined RF resonators

IEEE MTT-S International Microwave Symposium Digest

Volumn 3, Issue , 2003, Pages 1801-1804

  Strohm, Karl M ^a   Schmückle, Franz Josef ^b   Yaglioglu, Onnik ^a   Luy, Johann Friedrich ^a   Heinrich, Wolfgang ^b  

^a DAIMLER AG   (Germany)

^b LEIBNIZ INSTITUT FÜR HÖCHSTFREQUENZTECHNIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SILICON WAFERS;

MULTIPLE-WAFER STRUCTURES;

CAVITY RESONATORS;

EID: 0041589777     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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7. Y. Cassivi, L. Perregrini, K. Wu and G. Conciauro, "Low Cost and High Q-Millimeter-Wave Resonator Using Substrate Integrated Waveguide Technique", 2002 European Microwave Conference Digest, vol. 2, pp. 737-740.
8. K. M. Strohm,. F. J. Schmückle, B. Schauwecker, J.F. Luy, W. Heinrich, "Silicon Micromachined RF MEMS Resonators" 2002 IEEE MTT-S Digest, vol. 2, pp.1209-1212.