Surface morphology and dynamic scaling in growth of iron nitride thin films deposited by dc magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 4, 2003, Pages 983-987

  Wang, X ^a   Zheng, W T ^a   Gao, L J ^a   Wei, L ^a   Guo, W ^a   Bai, Y B ^a   Fei, W D ^b   Meng, S H ^b   He, X D ^b   Han, J C ^b  

^a JILIN UNIVERSITY   (China)

^b HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; FILM GROWTH; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; MORPHOLOGY; SURFACE ROUGHNESS; X RAY DIFFRACTION ANALYSIS; X RAY SCATTERING;

DYNAMIC SCALING; GRAZING INCIDENCE X RAY SCATTERING; IRON NITRIDE; KARDAR-PARISI-ZHANG UNIVERSALITY;

IRON COMPOUNDS;

EID: 0041529689     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1582452     Document Type: Article

References (15)

1. P. Meakin, Fractal Scaling and Growth Far from Equilibrium (Cambridge University Press, Cambridge, UK, 1998), Chaps. 2 and 3.
2. C. Licoppe, Y. I. Nissim, and C. d'Anterroches, Phys. Rev. B 37, 1287 (1988).
3. M. Kardar, G. Parisi, and Y.C. Zhang, Phys. Rev. Lett. 56, 889 (1986).
4. J. Krug, M. Plischke, and M. Siegert, Phys. Rev. B 70, 3271 (1993).
5. C. V. Dharmadhikari, A. O. Ali, N. Suresh, D. M. Phase, S. M. Chaudhari, V. Ganesan, A. Gupta, and B. A. Dasannacharya, Solid State Commun. 114, 377 (2000).
6. I. Procaccia, M. H. Jensen, V. S. L'vov, K. Sneppen, and R. Zeitak, Phys. Rev. A 46, 3220 (1992).
7. M. Kardar, Physica B 221, 60 (1996).
8. F. Family, J. Phys. A 18, L75 (1985).
9. T. K. Kim and M. Takahashi, Appl. Phys. Lett. 20, 492 (1972).
10. M. Takahashi and H. Shoji, J. Magn. Magn. Mater. 208, 145 (2000).
11. C. Ortiz, G. Dumpich, and A. H. Morrish, Appl. Phys. Lett. 65, 2737 (1994).
12. D. H. Mosca, P. H. Dionisio, W. H. Schreiner, I. J. R. Baumvol, and C. Achete, J. Appl. Phys. 67, 7514 (1990).
13. J. Krim and G. Palasantazas, Int. J. Mod. Phys. B 9, 599 (1995).
14. S. Sinha, E. B. Sirota, S. Garoff, and H. B. Stanley, Phys. Rev. B 38, 2297 (1988).
15. M. Siegert and M. Plischke, Phys. Rev. Lett. 68, 2035 (1992).