The universality classes in growth of iron nitride thin films deposited by magnetron sputtering

Materials Chemistry and Physics

Volumn 82, Issue 2, 2003, Pages 254-257

  Wang, Xin ^a   Zheng, Weitao ^a   Gao, Lijuan ^a  

^a JILIN UNIVERSITY   (China)

Author keywords

DC magnetron sputtering; Fe N films; Universality class

Indexed keywords

GLASS; IRON COMPOUNDS; MAGNETRON SPUTTERING; NITROGEN; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

IRON NITRIDE FILMS;

THIN FILMS;

EID: 0041509046     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(03)00217-7     Document Type: Article

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