Cost of ownership model for inspection of multiple quality attributes

IEEE Transactions on Semiconductor Manufacturing

Volumn 16, Issue 3, 2003, Pages 565-571

  Sohn, So Young ^a   Moon, Hyoung Uk ^a  

^a Yonsei University   (South Korea)

Author keywords

COO; Engineering economy; Inspection equipment; Inspection error

Indexed keywords

COMPUTER SOFTWARE; COSTS; ERRORS; INSPECTION; INSPECTION EQUIPMENT; MATHEMATICAL MODELS; PRODUCTION ENGINEERING; PURCHASING; QUALITY CONTROL;

COST OF OWNERSHIP; ENGINEERING ECONOMY; INSPECTION ERROR;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0041384547     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2003.815897     Document Type: Article

References (12)

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