Patterned pyroelectric electron emitters and their feasibility study for lithography applications

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 6 A, 2003, Pages 3523-3525

  Moon, Chang Wook ^a   Kim, Dong Wook ^a   Rosenman, G ^b   Ko, Tae Kuk ^c   Yoo, In K ^a  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b TEL AVIV UNIVERSITY   (Israel)

^c Yonsei University   (South Korea)

Author keywords

1:1 electron beam projection; LiNbO3; Patterned electron emitter; Pyroelectric

Indexed keywords

ELECTRIC CURRENTS; ELECTROMETERS; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ELECTRON EMISSION; LITHIUM NIOBATE; PHOTODIODES; SILICA; SINGLE CRYSTALS; THIN FILMS;

ELECTRON BEAM PROJECTION SYSTEM; ELECTRON EMITTER; EMITTER STRUCTURE; LITHIUM NIOBATE SINGLE CRYSTAL;

PYROELECTRICITY;

EID: 0041379711     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.3523     Document Type: Article

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