Design fabrication and test of micromachined silicon capacitive gas sensors with integrated read-out

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5116 I, Issue , 2003, Pages 92-99

  Amirola, Jorge ^a   Rodríguez, Angel ^a   Castañer, Luis ^a  

^a UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

Author keywords

Capacitive sensing; Gas sensors; MEMS; Microcantilever

Indexed keywords

ATOMIC FORCE MICROSCOPY; BIMETALS; INTEGRATED CIRCUIT MANUFACTURE; MATERIALS TESTING; MICROMACHINING; SEMICONDUCTING SILICON; STRESSES; THERMOGRAVIMETRIC ANALYSIS; VISCOELASTICITY;

CAPACITIVE GAS SENSORS; DESIGN FABRICATION; INTERFACE CIRCUITRY; MICROMACHINED CANTILEVERS; OPTICAL DETECTION; TRANSDUCTION MECHANISMS;

CHEMICAL SENSORS;

EID: 0041328159     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.498660     Document Type: Conference Paper

References (12)

1. G. Binnig, C.F. Quate, C. Gerber "Atomic Force Microscope" Phys. Rev. Lett. Vol.56, No 9, pp. 930-933, March 1986.
2. H.P. Lang, M.K. Baller, R. Berger, Ch. Gerber, J. K. Gimzewski, F.M. Battiston, P. Fornaro, J.P. Ramseyer, E. Meyer, H.J. Güntherodt "An artificial nose based on a micromechanical cantilever array" Analytica Chimica Acta, Vol. 393, No 1, pp. 59-65, 1999.
3. P.G. Datskos, S. Rajic, M.J. Sepaniak, N. Lavrik, C.A. Tipple, L.R. Senesac, I. Datskou "Chemical detection based on adsorption-induced and photoinduced stresses in microelectromechanical systems devices" J. Vac. Sci. technol. B Vol. 19, No 4, pp. 1173-1179, Jul/Aug 2001.
4. G. Y. Chen, T. Thundat, E. A. Watcher, and R. J. Warmack "Adsorption-Induced Surface Stress and Its Effects on Resonance Frequency of Microcantilevers", J. Appl. Phys., Vol. 77, pp. 3618-3622, 1995.
5. G. G. Stoney, "The Tension of Metallic Films Deposited by Electrolysis", Proc. R. Soc. London, Vol. A 82, pp. 172-175, 1909.
6. Roberto Raiteri, Massimo Grattarola and Rüdiger Berger, "Micromechanics senses biomolecules", Materials Today, January 2002, pp. 22-29.
7. M. K. Andrews, C.C. Turner, "Bipolar effects in the fabrication of silicon membranes by the anodic etch stop", Sens. Actuators, A, Phys. 29 (1991) pp.49-57.
8. B. Schmidt et al, "Preparation and characterization of ultrathin crystalline silicon membranes", Sens. Actuators, A, Phys. 41-42 (1994) pp.689-649.
9. Zhonghui H. Fan and D. Jed Harrison "Micromachining of Capillary Electrophoresis Injectors and Separators on Glass Chips and Evaluation of Flow at Capillary Intersections" Anal. Chem. 1994, Vol. 66, No. 1, pp. 177-184.
10. Shuichi Shoji et al, "Anodic bonding below 180°C for packaging and assembling of MEMS using Li AlSi-B-Quartz glass-ceramic" Sensors & Actuators (A) vol A64 no1 Jan 1998 pp. 95-100.
11. E. A. Wachter and T. Thundat, "Micromechanical sensors for chemical and physical instruments", Rev. of Sci. Instruments, June 1995, Vol. 66, No. 6, pp. 3662-3667.
12. PX223HT Casting urethane resin under vacuum for technical and prototypes parts www.axson.com