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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 3, 1996, Pages 905-912

Solid phase epitaxy of β-FeSi2 on Si(100)

(4) Chen, H a Han, P a Huang, X D a Zheng, Y D a

a NANJING UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041081594 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.580412 Document Type: Article

Times cited : (7)

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