Low-temperature MOCVD of V-C-N coatings using bis(arene)vanadium as precursors

Surface and Coatings Technology

Volumn 108-109, Issue , 1998, Pages 200-205

  Abisset, S ^a   Maury, F ^a  

^a Laboratoire de Cristallochimie   (France)

Author keywords

Bis(arene)vanadium precursors; Coatings; MOCVD; Vanadium carbides; Vanadium metal; Vanadium nitrides

Indexed keywords

CRYSTAL STRUCTURE; FILM GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; ORGANOMETALLICS; PHASE COMPOSITION; POLYCRYSTALLINE MATERIALS; SOLID SOLUTIONS; STEEL; SUBSTRATES; SUPERSATURATION; VANADIUM COMPOUNDS;

BODY-CENTERED CUBIC (BCC) STRUCTURE; VANADIUM CARBIDE; VANADIUM NITRIDE;

CERAMIC COATINGS;

EID: 0040960565     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00619-7     Document Type: Article

References (20)

1. Sundgren J.E., Hentzell H.T.G. J. Vac. Sci. Technol. A. 4:1986;2259.
2. L. Valade, R. Choukroun, P. Cassoux, F. Teyssandier, L. Poirier, R. Feurer, P. Bonnefond, F. Maury, in: S.T. Oyama (Ed.), The Chemistry of Transition Metal Carbides and Nitrides, Blackie Academic & Professional, Glasgow, 1996, p. 291.
3. Fix R., Gordon R.G., Hoffman D.M. Chem. Mater. 5:1993;614.
4. Bonnefond P., Feurer R., Reynes A., Maury F., Chansou B., Choukroun R., Cassoux P. J. Mater. Chem. 6:1996;1501.
5. Schuster F., Maury F., Nowak J.F. Surf. Coat. Technol. 43 44:1990;185.
6. Schuster F., Maury F., Nowak J.F., Bernard C. Surf. Coat. Technol. 46:1991;275.
7. Maury F., Gueroudji L., Vahlas C. Surf. Coat. Technol. 86 87:1996;316.
8. F. Maury, L. Gueroudji, C. Vahlas, S. Abisset, L. Pelletier, in: M.D. Allendorf, C. Bernard (Eds.), Proc. 14th Int. Conference on CVD and 11th EURO-CVD, vol. 97-25, The Electrochem. Soc. Inc., Pennington, NJ, 1997, p. 944.
9. Müller J., Göser P. J. Organometal. Chem. 12:1968;163.
10. Petukhov G.G., Druzkhov O.N., Zborovskaya L.S., Artemov A.N., Postnikova T.K., Emel'yanova A.S. J. Gen. Chem. USSR. 44:1974;2184.
11. Tel'noi V.I., Rabinovich I.B. Russian Chem. Rev. 46:1977;689.
12. Andrews J.T.S., Westrum E.F. Jr., Bjerrum N. J. Organomet. Chem. 17:1969;239.
13. D.R. Stull, in: R.C. Weast (Ed.), Handbook of Chemistry and Physics, 66th ed., CRC Press, Boca Raton, FL, 1986, D-192.
14. Maury F., Oquab D., Manse J.C., Morancho R., Nowak J.F., Gauthier J.P. Surf. Coat. Technol. 41:1990;51.
15. Pivin J.C., Roques-Carmes C., Slodzian G. Int. J. Mass Spectrosc. Ion Phys. 26:1978;219.
16. Polikarpov V.B., Luzin A.S., Dodonov V.A., Klement'ev E.K. Iz. Akad. Nauk SSSR, Neorg. Mater. 20:1984;1839.
17. Polikarpov V.B., Luzin A.S., Dodonov V.A. Zh. Priklad. Khim. 57:1984;680.
18. KIoster G., Reisinger K. J. Anal. Appl. Pyrol. 17:1990;357.
19. E.K. Storms, in J.L. Margrave (ed.), The Refractory Carbides, Academic Press, New York, 1967, p. 47.
20. Farges G., Beauprez E., Degout D. Surf. Coat. Technol. 54 55:1992;115.